产品型号
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GaN-FS-C-SI-S10
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尺寸
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10×10.5mm2
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厚度
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350±25μm
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晶体取向
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C-plane(0001)off angle toward M-Axis 0.35°±0.15°
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TTV
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≤10μm
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弯曲度
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≤10μm
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导电类型
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Semi-Insulating
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电阻率(300 K)
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> 106Ω·cm
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位错密度
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From 1x105to 3x106cm-2
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有效面积
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>90%
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抛光
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Front Surface:Ra<0.2 nm(polished);
or <0.3nm(polished and surface treatment for epitaxy)
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Back Surface:0.5~1.5μm;
option:1-3nm(Fine ground);<0.2nm(polished)
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包装
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Packaged in a class 100 clean room environment,
in single container,under a nitrogen atmosphere.
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