E2 optical fiber coupled photoelectric test probe station is a cost-effective photoelectric test probe station. In addition to all the functions of a conventional probe station, it also has an optical optical path suitable for a variety of test conditions. Not only can we use various light sources such as laser, xenon lamp, LED, etc. to illuminate the sample, but it also has two illumination methods, focused illumination and uniform illumination. The spot size covers a wide range from 1 micron to 5 mm. The supporting Metatest Suite test software package integrates the control functions of all optical and electrical test equipment, and can customize the parameter scanning in any combination, which greatly simplifies the test process. The E2 probe station also has numerous configuration options, including test modules for photoluminescence (PL) and electroluminescence (EL).

Main configuration*

4 probe bases, 5 micron diameter probes, connected using triax cable
Sample stage XYZR four-axis displacement function, with vacuum sample adsorption, can be quickly extracted
Microscope XYZ three-axis translation, optional motorized XY translation function
Microscope 2x, 5x, 10x, 20x, 50x 5 objective lenses and 1 1-5mm aperture
Laser Standard 405nm, 520nm, 635nm single-mode polarization maintaining laser, 450nm, 488nm, 505nm, 650nm laser can be selected. The laser can be analog and digital modulation. The modulation bandwidth is greater than 100kHz.
Laser illumination light path Uniform intensity spot illumination module, spot diameter 8-200 microns, can be equipped with focused spot illumination module, spot diameter is about 1 micron
Optoelectronic test system Including source meter, preamplifier, signal generator, oscilloscope and other hardware and Metatest Suite test software package, current test resolution 100fA, maximum voltage ± 200V, transient photocurrent test system rising / falling edge 50μs (1nA Current), 2μs (greater than 100nA current)
Optional function: Fluorescence spectrum test module (405nm excitation), absorption spectrum test module, polarization test module, electroluminescence spectrum test module, xenon lamp module, ultraviolet / infrared color difference-free optical path module
* Please download the detailed configuration file for detailed parameters.

E2 Structural Design

The probe stage body contains 4 probe bases, and the sample stage can be moved along the four axes of XYZR, which is convenient for controlling the measurement position. The sample is adsorbed on the sample stage through the vacuum adsorption chassis, and the sample stage can be quickly pulled out and replaced.

The stacked optical path design can install up to 4 optical path modules, and each optical path module can achieve different optical functions, such as coupling a laser into an optical system or measuring the fluorescence spectrum of a sample. Each layer is fixed by a dovetail slot, which can quickly expand new functions.

Photocurrent test function

E2 provides two different types of illumination spots. The standard configuration is a homogenization illumination module, which can convert the laser into a uniform small spot and illuminate the sample, and provides a white LED as an indicator light to indicate the laser irradiation position. The uniform light spot also facilitates the calculation of the optical power density during the test, with a minimum spot size of 8 microns. The focused illumination spot focuses the laser light directly on the sample surface to form a tiny Gaussian spot with a spot size of about 1 micron, which can be positioned at a specified position to excite the sample.

The Metatest Suite software package controls the test equipment in all systems in a unified manner, and can scan the parameters of up to 4 (2 groups) parameters with all efforts, so that it can measure the photocurrent curves under different light intensity and voltage at one time.

Test example (a) Change the output curve of the light intensity measurement device, (b) Transfer curve of the sample under light

(C) Transient photocurrent test. For 1nA photocurrent, the rise / fall time of the E2 system is only 50 microseconds. (D) Change the switch ratio of the light intensity detector.

Continuously adjustable light source

Xenon lamp module

The mXenon xenon lamp module uses a colorless optical system to ensure consistent spectral resolution from ultraviolet to infrared and higher ultraviolet light intensity. The optical power density in the 240-700nm band is greater than 20mW / cm2 (spot size 13.3 μm). Optically optimized shutters and choppers provide high-speed switching speeds (shutter opening / closing time 900 μs, chopper opening / closing time 20 μs at 1kHz).

(A) Optical power density at different wavelengths of 300nm and 500nm blazed gratings, (b) Spectra at different wavelengths of 300nm and 500nm blazed gratings, (c) Chopper switching speed, (d) Shutter switching speed

In addition to adjusting the output light intensity through software, the electric attenuator wheel also has a constant power output mode, which automatically adjusts the light intensity according to the output light wavelength to generate a fixed-power lighting source. Using a constant-power light source, you can measure the response rate of a sample at a specified light intensity and the I-V curve of the sample under different wavelength excitations.

(A) Constant power output mode, at a wavelength of 250-1100nm, fixed lighting optical power density of 15mW / cm2, output power stability of 3%, output curve and at a wavelength of 350-650nm, fixed lighting optical power density of 50mW / cm2, Power stability is 1%. Illumination range is 13 microns in diameter. (B) The silicon detector response rate curve (red line) measured at a fixed illumination optical power density of 15 mW / cm2. The blue line is the reference value. (C) I-V curves at different wavelengths.

Electroluminescence test function

The optional electroluminescence spectrum module can measure the electroluminescence spectrum of the sample. The cooled back-illuminated CCD spectrometer has a sensitive light response and can measure the weak luminescence of the sample. The measurement range is 300-1000nm. In the Metatest Suite software package, the excitation voltage of the sample can be scanned automatically and the emission spectrum can be measured. The photodetector can be used to measure the response speed of the sample‘s luminescence on the microsecond scale. Depending on the sensitivity of the sample, a silicon detector or a PMT detector can be selected to measure the light intensity emitted by the sample.

Electroluminescence test

(C) Electroluminescence spectra of samples under different bias voltages, (d) Transient characteristics of electroluminescence

source：https://www.metatest.cn/

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