20206215548671.pdf

E1-S diamond-to-top anvil two-dimensional material transfer system is the first commercial solution for low-dimensional material heterojunction device transfer in China. It is suitable for single-layer materials such as graphene, molybdenum sulfide and black phosphorus, and multi-layer van der Waals. The preparation of heterojunctions enables visualization of low-dimensional material transfer. The transfer system consists of a microscopic system, a three-axis transfer table, and a vacuum adsorption heating integrated sample stage. The target substrate stage can be rotated at a large angle in the surface, which is a powerful tool for studying the characteristics of heterojunction, the symmetry breaking of spatial inversion, and the influence of different stacking methods of two-dimensional materials. High stability, high precision mechanical design and high quality microscopic imaging system enable precise transfer of small samples of less than 5 μm.

E1-S is based on E1-T. The fixture of the slide mobile platform and the sample stage of the substrate carrier platform are specially designed to meet both conventional transfer of two-dimensional materials and diamond-to-anvil (DAC) transfer. .

The E1-S also has a number of configuration options, which are installed in the glove box and equipped with a damped optical shockproof platform.

Main configuration*

Substrate carrier platform XY direction two-axis translation, stroke 13mm; horizontal tilt angle adjustment 3~5 degrees; manual adjustment rotation around the z-axis ±90°; sample table heating maximum temperature is 240 °C; sample table with sample vacuum adsorption function and DAC device fixed function
Slide mobile platform XYZ direction three-axis manual translation, stroke 25mm; fast rotary sample introduction device
Monocular microscope zoom ratio 1:6.5, zoom range 0.7X-4.5X; 20 times long working distance objective lens, 31 mm working distance
Micro Camera 1920*1080 High Sensitivity CMOS Microscope; Provides Micro Camera Operation Software
High-stability microscopic observation bracket XY direction two-axis translation, stroke 50mm large range to adjust the microscope observation position
Control cabinet system electrical control integration, control sample table heating, adsorption function, control micro-lighting brightness adjustment
Display 24 inch 1920*1200 full HD professional display
Optional function Installed in the glove box, equipped with a damped optical anti-shock platform, etc.
* Please download the detailed configuration file for detailed parameters.

The standard configuration

☆☆☆E1-S On the basis of ensuring all the functions of E1-T, the fixture of the slide mobile platform and the sample stage of the substrate carrier platform are specially designed so that the DAC device can be fixed on the sample stage ( The E1-S system does not include a DAC unit and can be customized for the sample stage according to the customer‘s DAC size. By combining with an ultra-long working distance objective lens, it can meet the diamond that accurately transfers the two-dimensional material to the DAC device under microscopic observation. Experimental requirements for the end face. At the same time, the fixture and sample stage can be easily replaced to achieve a conventional transfer of two-dimensional materials similar to E1-T.

The micro-stent has been modified several times to provide high stability, ensuring no jitter in the micro imaging system under device operation. At the same time, it can perform two-axis translation in XY direction with a stroke of up to 50mm, which is convenient for large-scale adjustment of the microscope observation position to find samples.

The micro imaging optical path system consists of a continuously adjustable zoom single tube, a coaxial illumination system, a 20x ultra long working distance objective lens and a 1920*1080 high sensitivity CMOS micro camera. A hand-punched single-layer graphene sample on a silicon wafer can be clearly displayed. Provides micro camera operation software for photo shooting, recording video, measuring sample size, and split screen comparison.

The substrate loading platform is manually translated by two axes in the XY direction, the stroke is 13mm; the rotation is manually adjusted around the z axis by ±90°, with coarse and fine adjustment, the rotation precision can reach ±1°; the horizontal tilt angle is adjusted by 3~5 degrees, The parallelism of the sample on the substrate and the slide is adjusted during the transfer; the maximum temperature of the sample stage is 240 °C; the vacuum adsorption function of the sample strip sample ensures that the target sample position is accurately fixed during the transfer. The vacuum pump can be controlled by a solenoid valve with a flow rate of 50 L/min.

The slide moving platform XYZ direction two-axis manual translation, the stroke is 25mm, the precision can reach 0.001mm. It can guarantee the adjustment of sample position and has a fast rotary sample introduction device.

Optional function

Optional one: installation in the glove box environment

For the transfer of certain special environmentally demanding materials such as perovskite, it can be installed in the environment of the transfer system glove box.

Option 2: supporting damping optical anti-shock platform

Supporting damped optical anti-vibration platform to reduce environmental disturbance under high-speed operation (length and width 900*600*100mm table length and width 600*600*100mm table top and other specifications)

☆☆☆ Other special needs can be contacted for customization.

The real effect of the transfer effect is as follows:

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