20μm interdigital gold electrode single crystal silicon-based capacitor array high-precision scientific research biosensor chip MEMS

20μm interdigital gold electrode single crystal silicon-based capacitor array high-precision scientific research biosensor chip MEMS

【Numbering】BK2021012609 【CAS】cas
【Item No.】BK2021012609 【specification】
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E-mail:beikenano@gmail.com




1. Dimensions: 4mm*7mm*0.52mm.


2. Line width: 30 u m, line spacing: 20 u m, finger length: 1.4mm, number of interdigital fingers: 26 (52 fingers).


3. The electrode substrate is single crystal silicon, and the surface of the silicon wafer grows Si02 with a thickness of 300nm;


4. Metal layer structure: Cr/Au, thickness is 10nm, 100nm respectively;


5. Electrode operating temperature range: -150℃~500℃;


6. Mainly used in various chemical, physical and biological sensors, with reliable performance and stable quality.


Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance

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