3μm silicon-based interdigital electrode capacitance array MEMS gas biosensor with high photoelectric detection stability
| 【Numbering】BK2021012608 | 【CAS】cas | ||
| 【Item No.】BK2021012608 | 【specification】 | ||
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1. Dimensions: 6.5mm*4mm*0.52mm.
2. Line width: 5 u m, line spacing: 3 u m, finger length: 1.6mm, interdigital logarithm: 75 (150 fingers).
3. The electrode substrate is monocrystalline silicon, and silicon dioxide is grown on the surface of the silicon wafer with a thickness of 300nm;
4. Metal layer structure: Ti/Au, thickness is 30nm, 100nm;
5. Electrode operating temperature range: -150℃～500℃;
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2. Line width: 5 u m, line spacing: 3 u m, finger length: 1.6mm, interdigital logarithm: 75 (150 fingers).
3. The electrode substrate is monocrystalline silicon, and silicon dioxide is grown on the surface of the silicon wafer with a thickness of 300nm;
4. Metal layer structure: Ti/Au, thickness is 30nm, 100nm;
5. Electrode operating temperature range: -150℃～500℃;
6. Mainly used in various chemical, physical and medical sensors, with reliable performance and stable quality. 7. Large quantity and price favorably.
| Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance |
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| Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance.The website pictures are from the Internet. The pictures are for reference only. Please take the real object as the standard. In case of infringement, please contact us to delete them immediately. |
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