10μm silicon-based silica interdigital electrode high-precision MEMS gas biosensor photoelectric detection
| 【Numbering】BK2021012605 | 【CAS】cas | ||
| 【Item No.】BK2021012605 | 【specification】 | ||
|
|||
1. Dimensions: 4mm*6mm*0.52mm.
2. Line width: 10um, line spacing: 10um, finger length: 1.5mm, interdigital logarithm: 60 (120 fingers).
3. The electrode substrate is single crystal silicon, and siO2 is grown on the surface of the silicon wafer with a thickness of 300nm;
4. Metal layer structure: Cr/Au, thickness is 10nm, 100nm respectively;
5. Electrode operating temperature range: -150℃~500℃;
Message
2. Line width: 10um, line spacing: 10um, finger length: 1.5mm, interdigital logarithm: 60 (120 fingers).
3. The electrode substrate is single crystal silicon, and siO2 is grown on the surface of the silicon wafer with a thickness of 300nm;
4. Metal layer structure: Cr/Au, thickness is 10nm, 100nm respectively;
5. Electrode operating temperature range: -150℃~500℃;
6. Mainly used in various chemical, physical and medical sensors, with reliable performance and stable quality.
| Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance |
Message
|
| Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance.The website pictures are from the Internet. The pictures are for reference only. Please take the real object as the standard. In case of infringement, please contact us to delete them immediately. |
No video
Previous： the end...
Next： Fully automatic electr
