4 micron interdigital electrode monocrystalline silicon photoelectric detection gas humidity biosensor chip MEMS process IDE

4 micron interdigital electrode monocrystalline silicon photoelectric detection gas humidity biosensor chip MEMS process IDE

【Numbering】BK2021012601 【CAS】cas
【Item No.】BK2021012601 【specification】

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1. Dimensions: 4mm*6mm*0.52mm.
2. Line width: 6 μm, line distance: 4 μm, finger length: 1.5mm, number of interdigital pairs: 120 (240 fingers) 3. The electrode substrate is monocrystalline silicon, and the surface of the silicon wafer is grown with Si02, and the thickness is 300nm;

4. Metal layer structure: Cr/Au, thickness of 10nm, 100nm respectively;

5. Electrode operating temperature range: -150℃~500℃;
6. Mainly used in various chemical, physical and medical sensors, with reliable performance and stable quality. 7. Large quantity and price favorably.
We provide a variety of interdigital electrodes, including different shapes, different sizes, different line widths and distances, different substrates (alumina ceramics, PI/PET flexible materials, monocrystalline silicon), and different processes (thick film process, PCB process, MEMS process).


Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance

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