2 inch aluminum nitride thick film wafer

2 inch aluminum nitride thick film wafer

¡¾Numbering¡¿BK2020081715 ¡¾CAS¡¿
¡¾Item No.¡¿ ¡¾specification¡¿
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Performance parameters:

  • Item AlN-T-C-C50
    Dimension §¶ 50.8 ¡À 0.2 mm
    Thickness/Thickness STD 1-5¦Ìm¡À10%/<3%
    Orientation of AIN C-plane (0001) off angle toward A-axis 0.2¡À0.1¡ã
    Orientation Flat of AIN £¨1-100£©0¡À0.2¡ã£¬16¡À1mm
    Conduction Type Semi-Insulating
    XRD Crystal Quality [1,2)¦Ìm [2,3)¦Ìm [3,4)¦Ìm [4,5)¦Ìm
    (0002)FWHM(arcsec) ¡Ü80 ¡Ü100 ¡Ü120 ¡Ü160
    (10-12)FWHM(arcsec) ¡Ü650 ¡Ü550 ¡Ü450 ¡Ü400
    Structure ~1-5AIN/~20nm AIN buffer/430¡À25¦Ìm sapphire
    Edge Exclusion ¡Ü2.5¦Ìm
    Through Crack None
    Orientation of sapphire C plane(0001) off angle toward M-axis 0.2¡À0.1¡ã
    Orientation Flat of sapphire (11-20)0¡À0.2¡ã£¬16¡À1mm
    Sapphire Polish Single side polished(SSP)/Double side polished (DSP)
    Package Packagesd in a cleanroom in containers

    ɨÃèͼ£º Warm tips: Suzhou Beike nano products are only used for scientific research, not for human body,different batches of products have different specifications and performance
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